Voltage sharing is the key problem in development of high-voltage silicon stacks.The phenomenon of unequal voltage sharing is especially obvious at the ends of high-voltage silicon stacks.This paper analyzes the voltage sharing characteristics and the impact factors of high-voltage silicon stacks.A distributed parameter model of high-voltage silicon stack is set up

and the voltage sharing is investigated by EMTP simulation.The influences of voltage sharing component parameters on the end segments of the silicon stacks are analyzed.A method of unequal parameter voltage sharing is proposed.Numerical simulation and experiment are conducted to validate the effectiveness of the proposed method

and the results indicate that the proposed unequal parameter voltage sharing method can effectively reduce the voltage share at the end segments of a silicon stack

and therefore improve the reverse voltage-withstanding of whole silicon stack.