SF6 is widely used in high voltage power equipments as a nice insulating dielectric.However

as a major green house gas

the leakage will definitely cause danger to the people and environment.

as a state-of-the-art technology

has the advantage of high sensitivity

selectivity and dynamic range.This paper utilizes photoacoustic spectroscopy technology to design an SF6 leakage detection system at the wave length of 10.6 micrometer of IR source.The blends of air and different concentrations of SF6 are detected by the system to verify its accuracy.The result shows that the system can detect the lowest 0.01ppm SF6 gas with good linearity and stability.