In online monitoring of SF6 insulated electrical equipment

one of the most important technical problems is to solve the qualitative and quantitative problems of SF6 decomposition characteristic components. Reliable qualitative analysis is directly related to assessment of the nature of the equipment

and accurate quantitative analysis is impacting the determination on the fault severity of equipment. In this paper

quantifying method is adopted to prepare four kinds of decomposition components of SF6 with SF6as background gas

namely CO2/SF6、CF4/SF6、SOF2/SF6、SO2F2/SF6.The storage problems of the four gas reference materials have been solved. Besides

the short-term stability

pressure stability and long-term stability of the gas reference materials are investigated. Experiment results show that the standard uncertainties of the gas reference materials are all less than 0.2%. The short-term stability

pressure stability and long-term stability of all gas reference materials are good

and their expanded uncertainties are all less than 3%. Hence

these standard gases could be used in quantitative analysis of the decomposition characteristic components of SF6.