To study the discharge parameter characteristics of SF

6

mixtures

with the"two-term"approximation to solve the Boltzmann equation

the discharge parameters of different mixing ratio of SF

6

/N

2

SF

6

/CF

4

mixtures can be acquired including the electron energies distribution function（EEDF）

the equiva

lent ionization coefficient（α/N） and the equivalent attachment coefficient（η/N）

as well as the equivalent effective ionization coefficient. The effectiveness of the calculation method and results are proved by comparing with other experimental data. Results show that with an increase in E/N

the EEDF of the two mixtures in low-energy region decreases

while the EEDF in the high-energy region increases. The EEDF of SF

6

/N

2

gas mixtures frequently decreases at electron energy of3 e V. This phenomenon is related to the collision parameters of N

2

but don’t exist in SF

6

/CF

4

gas mixtures. When E/N is increased

the equivalent ionization coefficients of both mixtures have a significant increase with the attachment coefficient reduced

and the equivalent effective ionization coefficient also increases.