The decomposition of SF

6

discharge involves complex physical and chemical processes

and arc energy is one of the most important factors. This paper considers the role of arc energy on the plasma temperature

Saha（ionization）equation and Guldberg-Wagge（dissociation）equation is modified to establish mathematical model of SF

6

decomposition

SF

6

decomposition products and components in calculation

dynamic process of each particle composition and content with temperature changes;Particle number density of each components are calculated

in plasma when pressure is 0.1

0

.6 MPa and temperature is 300

4

1 300 K. The spectrum experiment platform is built

and the electron density of arc plasma at pressure of 0.1

0

.4 MPa is obtained. The results show that when the temperature of electron is less than 1 000 K

gas begins to decompose. The chemical reaction at different temperatures is not the same. The theoretical calculation results of the electron number density are in agreement with the experimental results

which prove the feasibility and accuracy of the method.