In order to better understand the discharge mechanism of the surface dielectric barrier discharge and illustrate the regularity evolution of characteristic parameters of the plasma

an equivalent circuit of the asymmetric surface dielectric barrier discharge plasma generator is established based on the experimental results of electrical and optical diagnostics of surface dielectric barrier discharge. The parameters such as the discharge current and electron density acquired by the equivalent circuit

model are fitting well with the experimental data

which proves the effectiveness of this model. Firstly

the variation of air gap voltage

voltage drop across the discharge gap

electron density

electron temperature

were calculated.Moreover

the influence of the slope of the power supply on the discharge parameters mentioned above is analyzed. It is shown that under the effect of the nanosecond discharge

there exists the second discharge under the rising edge and the reverse discharge under the falling edge

and the electron density and electron temperature are 2.7×10

18

m

-3

and 8.3 e V. The slope of the power supply takes important part in the discharge. As the voltage rate of rise is increased

the discharge occurs earlierand the current in the first discharge increases but the second discharge current decreases slightly. The increase of the voltage rate of decrease is positive correlation with the second discharge

but the first discharge current decreases slightly.