Experimental Study and Analysis of Gas Discharge with Micro-gap

DONG Keliang; SUN Yanzhou; LIU Xuguang

doi:10.13296/j.1001-1609.hva.2019.05.005

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Experimental Study and Analysis of Gas Discharge with Micro-gap

更新时间：2025-04-26

- Experimental Study and Analysis of Gas Discharge with Micro-gap
- High VoltageApparatus Vol. 55, Issue 5, Pages: 29-34(2019)
- 作者机构：
  
  河南理工大学电气工程与自动化学院
- 作者简介：
- 基金信息：
- DOI：10.13296/j.1001-1609.hva.2019.05.005
  CLC： O461
- Published：2019
- 稿件说明：
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[1]董克亮,孙岩洲,刘绪光.微间距气体放电的实验研究与分析[J].高压电器,2019,55(05):29-34.

DONG Keliang, SUN Yanzhou, LIU Xuguang. Experimental Study and Analysis of Gas Discharge with Micro-gap[J]. High voltageapparatus, 2019, 55(5): 29-34.
[1]董克亮,孙岩洲,刘绪光.微间距气体放电的实验研究与分析[J].高压电器,2019,55(05):29-34. DOI： 10.13296/j.1001-1609.hva.2019.05.005.

DONG Keliang, SUN Yanzhou, LIU Xuguang. Experimental Study and Analysis of Gas Discharge with Micro-gap[J]. High voltageapparatus, 2019, 55(5): 29-34. DOI： 10.13296/j.1001-1609.hva.2019.05.005.

摘要

为了研究微间距气体放电特性机理

在大气压环境下

采用了精密距离控制仪器进行电极间距为1～100μm的气体放电实验

得出了电极间距在1～100μm范围内的击穿电压

绘制了击穿电压曲线并讨论分析了1～5μm间距下击穿电压背离巴申曲线的原因。运用Fowler-Nordheim理论验证了在电极间距小于5μm时

气体放电过程由场致电子发射主导

并通过分析1～5μm间距内场强

进一步说明场致发射在此起主导作用。电极间距在10～15μm范围内时出现火花放电现象

分析认为该间距下的放电为电子崩引发的微间隙火花放电。电极间距在15～100μm范围内时击穿电压随着电极间距的增大而逐渐增大

击穿电压曲线与巴申曲线变化趋势相同

可以用汤逊机理解释。

Abstract

In order to study the mechanism of micro-gap gas discharge characteristics

instrument with measuring electrode distance of 1～100 μm is used to gas discharge experiments under atmospheric pressure. The breakdown voltage and breakdown voltage curve at 1～100 μm electrode gaps are obtained. The reason why the breakdown voltage deviates from the Paschen curve at the distance of 1～5 μm is analyzed. Fowler-Nordheim theory is used to verify that the field emission dominates during discharge when the electrode distance is less than 5 μm. The electric field within the 1～5 μm gaps is analyzed to further illustrate that the field emission plays a leading role. Spark discharge occurs when the electrode distance at 10～15 μm

and it is considered that the discharge at this distance is micro-gap spark discharge initiated by electron avalanche. In addition

the breakdown voltage increases with the increase of electrode distance at 15～100 μm

and the breakdown voltage curve has the same trend as the Paschen curve.

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