In order to compensate the deficiency of traditional dielectric barrier discharge（DBD）and coplanar dielectric barrier discharge（CDBD）on treating materials with three dimension or irregular shape

a three dimensional CDBD processing device driven by microsecond pulse power supply is designed.Spatially-surrounded plasma is generated by a plurality of single CDBD reactors inside the processing tank.The discharge power

luminescent image and emission spectrum are obtained by means of optical and electrical measurements.The influence of power supply parameters on discharge uniformity

the intensity of active particles and energy efficiency is investigated.The results show that the discharge area and uniformity are improved with the increasing of the supply power voltage.The whole surface discharge area is stimulated under the voltage of 11 kV

and uniform plasma is acquired Under the same voltage

the intensity of active particles increases with the increase of frequency

and the intensity of active particles is the strongest at 5 kHz operating frequency.The energy efficiency decreases with the increase of working frequency.The highest energy efficiency is 40.1%at 1 kHz operating frequency.The wood blocks of Pinus Sylvestris are taken as the target to verify the function of the device for treating three dimensional materials.After treatment

the hydrophobicity of treated surfaces is synchronously improved.The water contact angle of steady status decreases from 30°to 10°after 1 min treatment

and the duration for the water contact angle of the wood block to fall from the initial value to less than 30°is reduced by more than 70%.