MU Shilei, JIANG Jianjie, DENG Heming, et al. Research on SnO2/Pd Thin-film Hydrogen Sensor for Power Storage Detection and Its Performances[J]. High voltage apparatus, 2025, 61(6): 156-163.
DOI:
MU Shilei, JIANG Jianjie, DENG Heming, et al. Research on SnO2/Pd Thin-film Hydrogen Sensor for Power Storage Detection and Its Performances[J]. High voltage apparatus, 2025, 61(6): 156-163. DOI: 10.13296/j.1001-1609.hva.2025.06.018.
Research on SnO2/Pd Thin-film Hydrogen Sensor for Power Storage Detection and Its Performances
For improving the accuracy and efficiency of hydrogen concentration in early fault of power storage system and assuring safe operation and high stability of the storage equipment
a series of SnO
2
/Pd thin film hydrogen sensors are prepared by magnetron sputtering cosputtering technology. The metal-oxide-semiconductor films doped with SnO
2
/Pd are prepared on ceramic plates with different RF sputtering powers (130 W and 150 W)
and the comprehensive gas-sensitive properties are tested. The result shows that the 150 W-power sample (sample B) shows better responsiveness and higher operating temperature at the same hydrogen concentration
while the 130 W-power sample (sample A) shows better long-term stability. Both sensors have good selectivity
can effectively distinguish other interfering gases in the oil
and accurately detect the variation of hydrogen concentration. The new thin-film gas sensor has superior performance characteristics and provides a reliable technical means for real-time hydrogen monitoring in the field of electric power energy storage